Revenge of the Sith ends with Padmé Amidala dead, Anakin Skywalker sealed in the Darth Vader suit, Luke Skywalker hidden on Tatooine and Leia Organa taken to Alderaan.
Here is where each character lands:
- Anakin Skywalker: sealed into the Darth Vader suit as the Emperor's apprentice.
- Padmé Amidala: dies after giving birth to Luke and Leia.
- Luke: carried by Obi-Wan to Tatooine, where he is raised by Owen Lars.
- Leia: taken by Bail Organa to Alderaan.
- Obi-Wan Kenobi: goes into hiding, watching over Luke.
- Yoda: fights Darth Sidious, must retreat and goes into hiding.
- Palpatine: rules as Emperor and watches the early construction of the Death Star with Vader.
Why did Yoda go into exile? In the film, he fights Palpatine and must retreat, and after that the surviving Jedi hide.
The Mustafar duel is the hinge of the ending. Obi-Wan and Anakin fight a long duel across the volcanic planet, and Obi-Wan leaves Anakin horribly burned. The production context explains why the setting feels physical. According to StarWars.com's fun facts, cameraman Ron Frickle filmed Mount Etna after its November 2002 eruption, and ILM combined that footage with digital work for Mustafar. The same source says Steven Spielberg directed previsualization animatics for this duel, along with the Utapau chase and the Yoda versus Sidious duel, before he filmed War of the Worlds. Both of the film's big duels at the end, Obi-Wan against Anakin and Yoda against Sidious, were therefore planned in animatic form before the shoot.
The film's digital high definition cameras (per the production history on Wikipedia) mattered here too. Footage reached the editors on the day it was shot, which suited a finale that cuts between Mustafar, the Senate, Padmé's labor and the Emperor's reveal.
Compared with the rest of the series, this ending does something the other two prequels do not. Star Wars: Episode I - The Phantom Menace and Star Wars: Episode II - Attack of the Clones sit first and second in story order and end on open conflict. This film is fourth in chronological order and closes the loop by handing off to the original trilogy. The shot of Palpatine and Vader watching the early construction of the Death Star leads toward Star Wars, and the film already credits Wayne Pygram as Governor Tarkin. The hidden twins, Luke on Tatooine and Leia on Alderaan, are the setup that the later films pay off.
The ending also echoes an earlier beat of this film. Anakin kills the unarmed Count Dooku at Palpatine's urging early on, and by the end he is the Emperor's apprentice, rebuilt after Palpatine rescues him from Mustafar.
In my opinion, the ending works because it splits the family on purpose, with the twins separated and the father sealed away, so that each later film has a reason to bring them back together. It could be argued that the Mustafar duel is the stronger set piece, since the long fight across the volcanic planet ends with Obi-Wan leaving Anakin burned, but the quiet cut between the Death Star and the two hidden babies is what carries the story forward.
The film has no post credit scene, so there is nothing to wait for once the final image fades.